文献
J-GLOBAL ID:201702282846218318
整理番号:17A0907216
構造,非晶質Ge_2Sb_2Te_5膜の機械的及び光学的性質に及ぼすイオン衝撃と窒素取込の併用効果【Powered by NICT】
Combined effect of ion bombardment and nitrogen incorporation on structure, mechanical and optical properties of amorphous Ge2Sb2Te5 films
著者 (8件):
Liu Zhuan
(School of Materials Science and Engineering, State Key Laboratory of Superhard Materials, Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130012, China)
,
Huang Fei
(Department of Orthopedics, China-Japan Union Hospital of Jilin University, Changchun, Jilin 130033, China)
,
Huang Haihua
(School of Materials Science and Engineering, State Key Laboratory of Superhard Materials, Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130012, China)
,
Zhang Sam
(School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore)
,
Zhang Kan
(School of Materials Science and Engineering, State Key Laboratory of Superhard Materials, Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130012, China)
,
Zheng Weitao
(School of Materials Science and Engineering, State Key Laboratory of Superhard Materials, Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130012, China)
,
Zheng Weitao
(State Key Laboratory of Automotive Simulation and Control, Jilin University, Changchun 130025, China)
,
Hu Chaoquan
(School of Materials Science and Engineering, State Key Laboratory of Superhard Materials, Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130012, China)
資料名:
Vacuum
(Vacuum)
巻:
141
ページ:
32-40
発行年:
2017年
JST資料番号:
E0347A
ISSN:
0042-207X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)