文献
J-GLOBAL ID:201702283000393782
整理番号:17A0471314
高周波マグネトロンスパッタリングにより成長したMgNiO薄膜の構造と光学的性質に及ぼすスパッタリングガス圧の影響【Powered by NICT】
The effect of sputtering gas pressure on the structure and optical properties of MgNiO films grown by radio frequency magnetron sputtering
著者 (7件):
Xie Wuze
(School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, People’s Republic of China)
,
Jiao Shujie
(School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, People’s Republic of China)
,
Wang Dongbo
(School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, People’s Republic of China)
,
Gao Shiyong
(School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, People’s Republic of China)
,
Wang Jinzhong
(School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, People’s Republic of China)
,
Yu Qingjiang
(School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, People’s Republic of China)
,
Li Hongtao
(School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, People’s Republic of China)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
405
ページ:
152-156
発行年:
2017年
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)