文献
J-GLOBAL ID:201702284288165878
整理番号:17A0401005
無線周波数反応性マグネトロンスパッタリングにより作製したFとSiを同時ドープしたダイヤモンド状炭素膜の接着挙動【Powered by NICT】
Adhesion behavior of diamond-like carbon films with F and Si co-doping prepared by radio frequency reactive magnetron sputtering
著者 (6件):
Wu Wei
(College of Physics, Optoelectronics and Energy of Soochow University, Suzhou, 215006, China)
,
Zhu Zhipeng
(College of Physics, Optoelectronics and Energy of Soochow University, Suzhou, 215006, China)
,
Min Jiawei
(College of Physics, Optoelectronics and Energy of Soochow University, Suzhou, 215006, China)
,
Zhang Jiandong
(College of Physics, Optoelectronics and Energy of Soochow University, Suzhou, 215006, China)
,
Qian Non
(College of Physics, Optoelectronics and Energy of Soochow University, Suzhou, 215006, China)
,
Jiang Meifu
(College of Physics, Optoelectronics and Energy of Soochow University, Suzhou, 215006, China)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
622
ページ:
89-94
発行年:
2017年
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)