文献
J-GLOBAL ID:201702285431053859
整理番号:17A0055470
GaAs基板上のネガ型電子ビームnanoresist HSQの研究【Powered by NICT】
Study of negative electron beam nanoresist HSQ on GaAs substrate
著者 (6件):
Andok R.
(Institute of Informatics, Slovak Academy of Sciences, Du ́bravska ́ 9, 84507 Bratislava)
,
Bencurova A.
(Institute of Informatics, Slovak Academy of Sciences, Du ́bravska ́ 9, 84507 Bratislava)
,
Kostic I.
(Institute of Informatics, Slovak Academy of Sciences, Du ́bravska ́ 9, 84507 Bratislava)
,
Ritomsky A.
(Institute of Informatics, Slovak Academy of Sciences, Du ́bravska ́ 9, 84507 Bratislava)
,
Skriniarova J.
(Institute of Electronics and Photonics, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Ilkovic∨ova 3, 81219 Bratislava, Slovakia)
,
Vutova K.
(Institute of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko shosse, 1784 Sofia, Bulgaria)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
ASDAM
ページ:
133-136
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)