文献
J-GLOBAL ID:201702285749931415
整理番号:17A0057907
周波数の低温度係数を持つAINハイブリッドバルク音響波共振器に関する研究【Powered by NICT】
Study on AIN-based hybrid bulk acoustic wave resonator with low temperature coefficient of frequency
著者 (7件):
Yang Shuai
(Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China, A 35, Qinghua East Road, Haidian District Beijing)
,
Zhang Yun
(Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China, A 35, Qinghua East Road, Haidian District Beijing)
,
Sun Lili
(Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China, A 35, Qinghua East Road, Haidian District Beijing)
,
Zhang Lian
(Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China, A 35, Qinghua East Road, Haidian District Beijing)
,
Cheng Zhe
(Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China, A 35, Qinghua East Road, Haidian District Beijing)
,
Wang Junxi
(Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China, A 35, Qinghua East Road, Haidian District Beijing)
,
Li Jinmin
(Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China, A 35, Qinghua East Road, Haidian District Beijing)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
SSLChina: IFWS
ページ:
120-122
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)