文献
J-GLOBAL ID:201702286364188573
整理番号:17A1276811
0.01ドル/金型製品のためのはん痕自由「MIS(低侵襲手術)プロセスで作製した0.4mm×0.4mm気圧計センサチップ【Powered by NICT】
0.4mm×0.4mm barometer sensor-chip fabricated by a scar-free `MIS’ (minimally invasive surgery) process for 0.01US$/die product
著者 (5件):
Ni Zao
(State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China)
,
Jiao Ding
(State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China)
,
Zou Hongshuo
(State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China)
,
Wang Jiachou
(State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China)
,
Li Xinxin
(State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
TRANSDUCERS
ページ:
774-777
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)