文献
J-GLOBAL ID:201702287166290353
整理番号:17A0738624
ナノ厚TaNx/酸素充填TaNx構造上のCu薄膜の微細構造発展
Microstructural Evolution of Cu Thin Film on the Nano-Thin TaNx/Oxygen Stuffed TaNx Structure
著者 (10件):
NAM Minwoo
(Chung-Ang Univ., Seoul, KOR)
,
CHOI Eunmi
(Chung-Ang Univ., Seoul, KOR)
,
KIM Areum
(Chung-Ang Univ., Seoul, KOR)
,
KANG Keunwon
(Chung-Ang Univ., Seoul, KOR)
,
ZHENG Longshou
(Chung-Ang Univ., Seoul, KOR)
,
KWON Soon Hyeong
(Chung-Ang Univ., Seoul, KOR)
,
KIM Soo-Kil
(Chung-Ang Univ., Seoul, KOR)
,
HAHN Sang June
(Chung-Ang Univ., Seoul, KOR)
,
YUN Ju Young
(Korea Res. Inst. Standards and Sci., Daejeon, KOR)
,
PYO Sung Gyu
(Chung-Ang Univ., Seoul, KOR)
資料名:
Journal of Nanoscience and Nanotechnology
(Journal of Nanoscience and Nanotechnology)
巻:
16
号:
10
ページ:
11018-11021
発行年:
2016年10月
JST資料番号:
W1351A
ISSN:
1533-4880
CODEN:
JNNOAR
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)