文献
J-GLOBAL ID:201702287609220035
整理番号:17A0009338
水素化Si(001)上の二原子ステップ制御によるIII~V/Si共同集積に向けて
Toward the III-V/Si co-integration by controlling the biatomic steps on hydrogenated Si(001)
著者 (15件):
Martin M.
(Univ. Grenoble Alpes, CNRS, LTM, F-38054 Grenoble, France)
,
Caliste D.
(Univ. Grenoble Alpes, F-38000 Grenoble, France and CEA, INAC-MEM, F-38054, Grenoble, France)
,
Cipro R.
(Univ. Grenoble Alpes, CNRS, LTM, F-38054 Grenoble, France)
,
Alcotte R.
(Univ. Grenoble Alpes, CNRS, LTM, F-38054 Grenoble, France)
,
Moeyaert J.
(Univ. Grenoble Alpes, CNRS, LTM, F-38054 Grenoble, France)
,
David S.
(Univ. Grenoble Alpes, CNRS, LTM, F-38054 Grenoble, France)
,
Bassani F.
(Univ. Grenoble Alpes, CNRS, LTM, F-38054 Grenoble, France)
,
Cerba T.
(Univ. Grenoble Alpes, CNRS, LTM, F-38054 Grenoble, France)
,
Bogumilowicz Y.
(Univ. Grenoble Alpes, F-38000 Grenoble, France and CEA, LETI, MINATEC Campus, F-38054 Grenoble, France)
,
Sanchez E.
(Applied Materials, 3050 Bowers Avenue, Santa Clara, California 95054, USA)
,
Ye Z.
(Applied Materials, 3050 Bowers Avenue, Santa Clara, California 95054, USA)
,
Bao X. Y.
(Applied Materials, 3050 Bowers Avenue, Santa Clara, California 95054, USA)
,
Pin J. B.
(Applied Materials, 3050 Bowers Avenue, Santa Clara, California 95054, USA)
,
Baron T.
(Univ. Grenoble Alpes, CNRS, LTM, F-38054 Grenoble, France)
,
Pochet P.
(Univ. Grenoble Alpes, F-38000 Grenoble, France and CEA, INAC-MEM, F-38054, Grenoble, France)
資料名:
Applied Physics Letters
(Applied Physics Letters)
巻:
109
号:
25
ページ:
253103-253103-5
発行年:
2016年12月19日
JST資料番号:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)