文献
J-GLOBAL ID:201702287735890154
整理番号:17A0908186
非晶質窒化炭素膜の微細構造と機械的性質に及ぼす陽極層線形イオン源の影響【Powered by NICT】
Effects of anode layer linear ion source on the microstructure and mechanical properties of amorphous carbon nitride films
著者 (8件):
Ye Peng
(College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
,
Xu Feng
(College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
,
Wu Jinxin
(College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
,
Tian Shuai
(College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
,
Zhao Xianrui
(College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
,
Zhao Xianrui
(College of Physics and Electronic Engineering, Zhejiang Provincial Key Laboratory for Cutting Tools, Taizhou University, Taizhou 318000, China)
,
Tang Xiaolong
(College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
,
Zuo Dunwen
(College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
資料名:
Surface & Coatings Technology
(Surface & Coatings Technology)
巻:
320
ページ:
183-189
発行年:
2017年
JST資料番号:
D0205C
ISSN:
0257-8972
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)