文献
J-GLOBAL ID:201702288776833825
整理番号:17A0118555
多層金属技術によるMEMS慣性センサのプルーフマス構造設計のための減衰定数モデル【Powered by NICT】
A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology
著者 (7件):
Konishi Toshifumi
(Nano-Technology Business Unit, NTT Advanced Technology Corporation, Atsugi-shi, Kanagawa, Japan)
,
Safu Teruaki
(Nano-Technology Business Unit, NTT Advanced Technology Corporation, Atsugi-shi, Kanagawa, Japan)
,
Machida Katsuyuki
(Nano-Technology Business Unit, NTT Advanced Technology Corporation, Atsugi-shi, Kanagawa, Japan)
,
Yamane Daisuke
(Laboratory for Future Interdisciplinary Research of Science and Technology, Tokyo Institute of Technology, Yokohama, Kanagawa, Japan)
,
Sone Masato
(Laboratory for Future Interdisciplinary Research of Science and Technology, Tokyo Institute of Technology, Yokohama, Kanagawa, Japan)
,
Masu Kazuya
(Laboratory for Future Interdisciplinary Research of Science and Technology, Tokyo Institute of Technology, Yokohama, Kanagawa, Japan)
,
Toshiyoshi Hiroshi
(Research Center for Advanced Science and Technology, The University of Tokyo, Meguro-ku, Tokyo Japan)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
SENSORS
ページ:
1-3
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)