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J-GLOBAL ID:201702288873137402
整理番号:17A0362471
ナノプロービング法による注入関連欠陥の電気的解析【Powered by NICT】
Electrical analysis on implantation-related defect by nanoprobing methodology
著者 (9件):
Chen C.Q.
(Product, Test and Failure Analysis, Globalfoundries, Singapore)
,
Ng P.T.
(Product, Test and Failure Analysis, Globalfoundries, Singapore)
,
Ang G.B.
(Product, Test and Failure Analysis, Globalfoundries, Singapore)
,
T an H.
(Product, Test and Failure Analysis, Globalfoundries, Singapore)
,
Rivai Francis
(Product, Test and Failure Analysis, Globalfoundries, Singapore)
,
Ma Y.Z.
(Product, Test and Failure Analysis, Globalfoundries, Singapore)
,
Ng H.P.
(Product, Test and Failure Analysis, Globalfoundries, Singapore)
,
Lam Jeffery
(Product, Test and Failure Analysis, Globalfoundries, Singapore)
,
Mai Z.H.
(Product, Test and Failure Analysis, Globalfoundries, Singapore)
資料名:
Microelectronics Reliability
(Microelectronics Reliability)
巻:
64
ページ:
317-320
発行年:
2016年
JST資料番号:
C0530A
ISSN:
0026-2714
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)