文献
J-GLOBAL ID:201702291199781087
整理番号:17A0318999
微細構造,DC及びRFマグネトロン同時スパッタリングにより蒸着した亜鉛酸化カドミウム膜の光学的および電気的特性に対するポストアニーリング雰囲気の影響【Powered by NICT】
Influence of post-annealing atmosphere on microstructure, optical and electrical properties of zinc cadmium oxide films deposited by DC and RF magnetron co-sputtering
著者 (8件):
Sui Y.R.
(Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Siping 136000, Jilin, China)
,
Song Y.P.
(Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Siping 136000, Jilin, China)
,
Wu Y.J.
(Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Siping 136000, Jilin, China)
,
Lang J.H.
(Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Siping 136000, Jilin, China)
,
Meng X.W.
(Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Siping 136000, Jilin, China)
,
Lv S.Q.
(Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Siping 136000, Jilin, China)
,
Yao B.
(State Key Laboratory of Superhard Materials and College of Physics, Jilin University, Changchun 130023, China)
,
Yang J.H.
(Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Siping 136000, Jilin, China)
資料名:
Ceramics International
(Ceramics International)
巻:
42
号:
14
ページ:
15166-15170
発行年:
2016年
JST資料番号:
H0705A
ISSN:
0272-8842
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)