文献
J-GLOBAL ID:201702292967387843
整理番号:17A0276515
圧力センサのためのCMUTの静電容量の計算と測定のための正確な設計【Powered by NICT】
An accurate design to calculate and measure the capacitance of CMUT for pressure sensors
著者 (6件):
Wang Jiujiang
(State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau)
,
Yu Yuanyu
(State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau)
,
Pun Sio Hang
(State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau)
,
Gao Yueming
(Key Lab of Medical Instrumentation & Pharmaceutical Technology of Fujian Province, Fuzhou, China)
,
Che U Kin
(State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau)
,
Mak Peng Un
(Department of Electrical and Computer Engineering, University of Macau, Macau)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
ICCE-China
ページ:
1-4
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)