文献
J-GLOBAL ID:201702294950870715
整理番号:17A0381651
双方向熱膨張流に基づく微細加工した3軸ガス慣性センサ【Powered by NICT】
A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow
著者 (4件):
Nie Bin
(MOE Key Laboratory of Micro and Nano System for Aerospace, Northwestern Polytechnical University, Xi’an, China)
,
Wang Weimin
(MOE Key Laboratory of Micro and Nano System for Aerospace, Northwestern Polytechnical University, Xi’an, China)
,
Ye Fang
(MOE Key Laboratory of Micro and Nano System for Aerospace, Northwestern Polytechnical University, Xi’an, China)
,
Chang Honglong
(MOE Key Laboratory of Micro and Nano System for Aerospace, Northwestern Polytechnical University, Xi’an, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
MEMS
ページ:
1091-1094
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)