文献
J-GLOBAL ID:201802210858537795
整理番号:18A1895143
光パターン化可能なドライフィルム接着剤と対称マイクロCuピラーはんだバンプを用いた低温ウエハレベルハイブリッドボンディングの最適化と特性評価【JST・京大機械翻訳】
Optimization and Characterization of Low-Temperature Wafer-Level Hybrid Bonding Using Photopatternable Dry Film Adhesive and Symmetric Micro Cu Pillar Solder Bumps
著者 (6件):
Yao Mingjun
(School of Materials Science and Engineering, Dalian University of Technology, Dalian, China)
,
Zhao Ning
(School of Materials Science and Engineering, Dalian University of Technology, Dalian, China)
,
Wang Teng
(Huatian Technology (Kunshan) Electronics Company Ltd., Kunshan, China)
,
Yu Daquan
(Huatian Technology (Kunshan) Electronics Company Ltd., Kunshan, China)
,
Xiao Zhiyi
(Huatian Technology (Kunshan) Electronics Company Ltd., Kunshan, China)
,
Ma Haitao
(School of Materials Science and Engineering, Dalian University of Technology, Dalian, China)
資料名:
IEEE Transactions on Components, Packaging, and Manufacturing Technology
(IEEE Transactions on Components, Packaging, and Manufacturing Technology)
巻:
8
号:
10
ページ:
1855-1862
発行年:
2018年
JST資料番号:
W0590B
ISSN:
2156-3950
CODEN:
ITCPC8
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)