文献
J-GLOBAL ID:201802223356993934
整理番号:18A0971631
非対称容量結合高周波NeおよびCF_4プラズマにおけるモード遷移の実験的研究【JST・京大機械翻訳】
Experimental investigation of mode transitions in asymmetric capacitively coupled radio-frequency Ne and CF4 plasmas
著者 (5件):
Liu Gang-Hu
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China)
,
Liu Yong-Xin
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China)
,
Bai Li-Shui
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China)
,
Zhao Kai
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China)
,
Wang You-Nian
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China)
資料名:
Physics of Plasmas
(Physics of Plasmas)
巻:
25
号:
2
ページ:
023515-023515-14
発行年:
2018年
JST資料番号:
T0641B
ISSN:
1070-664X
CODEN:
PHPAEN
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)