文献
J-GLOBAL ID:201802223995455548
整理番号:18A0137954
地震測定のための高精度MEMSベース容量型加速度計【Powered by NICT】
A high precision MEMS based capacitive accelerometer for seismic measurements
著者 (6件):
Utz Alexander
(Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany)
,
Walk Christian
(Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany)
,
Stanitzki Alexander
(Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany)
,
Mokhtari Mir
(Mir Enterprises Limited, 173c Goldhurst Terrace, Hampstead, London, NW6 3ES, United Kingdom)
,
Kraft Michael
(Montefiore Institute, University of Liege, Rue de la Decouverte, Liege, 4000, Belgium)
,
Kokozinski Rainer
(Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
ICSENS
ページ:
1-3
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)