文献
J-GLOBAL ID:201802227312247604
整理番号:18A1385071
高精度で高帯域幅のMEMSに基づく容量性加速度計【JST・京大機械翻訳】
A High-Precision and High-Bandwidth MEMS-Based Capacitive Accelerometer
著者 (6件):
Utz Alexander
(Department of Integrated Circuits and Systems, Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg, Germany)
,
Walk Christian
(Department of Micro and Nanosystems, Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg, Germany)
,
Stanitzki Alexander
(Department of Integrated Circuits and Systems, Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg, Germany)
,
Mokhtari Mir
(Mir Enterprises Ltd., London, U.K.)
,
Kraft Michael
(Department of Electrical Engineering, MICAS, KU Leuven, Leuven, Belgium)
,
Kokozinski Rainer
(Department of Integrated Circuits and Systems, Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg, Germany)
資料名:
IEEE Sensors Journal
(IEEE Sensors Journal)
巻:
18
号:
16
ページ:
6533-6539
発行年:
2018年
JST資料番号:
W1318A
ISSN:
1530-437X
CODEN:
ISJEAZ
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)