文献
J-GLOBAL ID:201802229298417242
整理番号:18A1680647
CMOS集積化スケーラブルプロセス技術における新しい512 ・320チップ傾斜マイクロミラーアレイ【JST・京大機械翻訳】
Novel 512 ・ 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
著者 (17件):
Gehner A.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Durr P.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Kunze D.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Rudloff D.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Elgner A.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Heber J.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Frances S.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Skupsch C.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Torlee H.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Eckert M.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Friedrichs M.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Schmidt J.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Pufe W.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Doring S.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Hohle C.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Schulze M.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
,
Wagner M.
(Fraunhofer Institute for Photonic Microsystems, IPMS, Maria-Reiche-Stras&e 2, Dresden, 01109, Germany)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2018
号:
OMN
ページ:
1-2
発行年:
2018年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)