文献
J-GLOBAL ID:201802229496950111
整理番号:18A0728898
分光光電子ホログラフィー法によるシリコン中にドープした不純物原子の3D原子配置の解析【JST・京大機械翻訳】
Analyses of 3D atomic arrangements of impurity atoms doped in silicon by spectro-photoelectron holography technique
著者 (11件):
Tsutsui Kazuo
(Institute of Innovative Research, Tokyo Institute of Technology, 4259-J2-69, Nagatsuta, Midori-ku, Yokohama 226-8503, Japan)
,
Matsushita Tomohiro
(Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan)
,
Muro Takayuki
(Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan)
,
Morikawa Yoshitada
(Department of Precision Science and Technology, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan)
,
Natori Kotaro
(School of Engineering, Tokyo Institute of Technology, 4259, Nagatsuta, Midori-ku, Yokohama 226-8502, Japan)
,
Hoshii Takuya
(School of Engineering, Tokyo Institute of Technology, 4259, Nagatsuta, Midori-ku, Yokohama 226-8502, Japan)
,
Kakushima Kuniyuki
(School of Engineering, Tokyo Institute of Technology, 4259, Nagatsuta, Midori-ku, Yokohama 226-8502, Japan)
,
Wakabayashi Hitoshi
(School of Engineering, Tokyo Institute of Technology, 4259, Nagatsuta, Midori-ku, Yokohama 226-8502, Japan)
,
Hayashi Kouichi
(Department of Physical Science and Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya, Aichi 466-8555, Japan)
,
Matsui Fumihiko
(Graduate School of Materials Science, Nara Institute of Science and Technology, Takayama-cho, Ikoma, Nara 630-0192, Japan)
,
Kinoshita Toyohiko
(Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2018
号:
IWJT
ページ:
1-6
発行年:
2018年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)