文献
J-GLOBAL ID:201802230473272019
整理番号:18A1646052
AlN膜の微小面積圧電特性の研究と高周波SAWデバイスの作製【JST・京大機械翻訳】
Research of micro area piezoelectric properties of AlN films and fabrication of high frequency SAW devices
著者 (9件):
Wang Fang
(School of Electrical & Electronic Information Engineering, Tianjin Key Laboratory of Film Electronic &Communication Devices, Tianjin University of Technology, Tianjin 300384, China)
,
Xiao Fuliang
(School of Electrical & Electronic Information Engineering, Tianjin Key Laboratory of Film Electronic &Communication Devices, Tianjin University of Technology, Tianjin 300384, China)
,
Song Dianyou
(School of Electrical & Electronic Information Engineering, Tianjin Key Laboratory of Film Electronic &Communication Devices, Tianjin University of Technology, Tianjin 300384, China)
,
Qian Lirong
(School of Electrical & Electronic Information Engineering, Tianjin Key Laboratory of Film Electronic &Communication Devices, Tianjin University of Technology, Tianjin 300384, China)
,
Feng Yulin
(School of Electrical & Electronic Information Engineering, Tianjin Key Laboratory of Film Electronic &Communication Devices, Tianjin University of Technology, Tianjin 300384, China)
,
Fu Bangran
(School of Electrical & Electronic Information Engineering, Tianjin Key Laboratory of Film Electronic &Communication Devices, Tianjin University of Technology, Tianjin 300384, China)
,
Dong Kaifei
(School of Electrical & Electronic Information Engineering, Tianjin Key Laboratory of Film Electronic &Communication Devices, Tianjin University of Technology, Tianjin 300384, China)
,
Li Can
(School of Electrical & Electronic Information Engineering, Tianjin Key Laboratory of Film Electronic &Communication Devices, Tianjin University of Technology, Tianjin 300384, China)
,
Zhang Kailiang
(School of Electrical & Electronic Information Engineering, Tianjin Key Laboratory of Film Electronic &Communication Devices, Tianjin University of Technology, Tianjin 300384, China)
資料名:
Microelectronic Engineering
(Microelectronic Engineering)
巻:
199
ページ:
63-68
発行年:
2018年
JST資料番号:
C0406B
ISSN:
0167-9317
CODEN:
MIENEF
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)