文献
J-GLOBAL ID:201802240362716784
整理番号:18A0129752
(マルチ)マグネトロン同時スパッタリングを用いて作製した(Ti,Cu)-オキシド勾配薄膜の元素組成と構造進化の研究【Powered by NICT】
Investigations of elemental composition and structure evolution in (Ti,Cu)-oxide gradient thin films prepared using (multi)magnetron co-sputtering
著者 (4件):
Mazur Michal
(Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11/17, 50-372 Wroclaw, Poland)
,
Domaradzki Jaroslaw
(Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11/17, 50-372 Wroclaw, Poland)
,
Wojcieszak Damian
(Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11/17, 50-372 Wroclaw, Poland)
,
Kaczmarek Danuta
(Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11/17, 50-372 Wroclaw, Poland)
資料名:
Surface & Coatings Technology
(Surface & Coatings Technology)
巻:
334
ページ:
150-157
発行年:
2018年
JST資料番号:
D0205C
ISSN:
0257-8972
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)