文献
J-GLOBAL ID:201802245622339524
整理番号:18A1900460
屈曲ベース3-PRPS並列マイクロ/ナノ位置決めシステム【JST・京大機械翻訳】
A Flexure-Based 3-PRPS Parallel Micro-/Nanopositioning System
著者 (8件):
Zhang Defu
(Chinese Academy of Sciences, Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin Province, China)
,
Chen Huanan
(Chinese Academy of Sciences, Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin Province, China)
,
Li Pengzhi
(Chinese Academy of Sciences, Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin Province, China)
,
Guo Kang
(Chinese Academy of Sciences, Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin Province, China)
,
Ni Mingyang
(Chinese Academy of Sciences, Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin Province, China)
,
Li Xianling
(Chinese Academy of Sciences, Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin Province, China)
,
Sui Yongxin
(Chinese Academy of Sciences, Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin Province, China)
,
Zhang Jianguo
(Chinese Academy of Sciences, Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Changchun, Jilin Province, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2018
号:
ICMA
ページ:
515-520
発行年:
2018年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)