文献
J-GLOBAL ID:201802246603427375
整理番号:18A1110818
Zr/Al_2O_3(0001)薄膜の超高真空マグネトロンスパッタリング蒸着中のZr-Al金属間化合物形成の動力学【JST・京大機械翻訳】
Kinetics of Zr-Al intermetallic compound formation during ultra-high vacuum magnetron sputter-deposition of Zr/Al2O3(0001) thin films
著者 (11件):
Tanaka Koichi
(Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA)
,
Fankhauser Joshua
(Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA)
,
Zaid Hicham
(Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA)
,
Aleman Angel
(Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA)
,
Sato Masaki
(Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan)
,
Yu Dian
(Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA)
,
Ebnonnasir Abbas
(Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA)
,
Li Chao
(Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA)
,
Kobashi Makoto
(Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan)
,
Goorsky Mark S.
(Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA)
,
Kodambaka Suneel
(Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA)
資料名:
Acta Materialia
(Acta Materialia)
巻:
152
ページ:
34-40
発行年:
2018年
JST資料番号:
A0316A
ISSN:
1359-6454
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)