文献
J-GLOBAL ID:201802260007567434
整理番号:18A0849803
パリレン-C堆積とマスクレスマイクロプラズマ描画を用いた紙ベースのマイクロ流体デバイスの直接および全乾式作製【JST・京大機械翻訳】
Direct and all-dry fabrication of paper-based microfluidic device using parylene-C deposition and maskless microplasma writing
著者 (6件):
Wang Tao
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano-electronics, Key Laboratory for Thin Film and Micro fabrication of Ministry of Education, and Collaborative Innovation Center of IFSA, Shanghai Jiao Tong University, Shanghai, China)
,
Hu M. S.
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano-electronics, Key Laboratory for Thin Film and Micro fabrication of Ministry of Education, and Collaborative Innovation Center of IFSA, Shanghai Jiao Tong University, Shanghai, China)
,
Yang Bin
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano-electronics, Key Laboratory for Thin Film and Micro fabrication of Ministry of Education, and Collaborative Innovation Center of IFSA, Shanghai Jiao Tong University, Shanghai, China)
,
Wang X. L.
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano-electronics, Key Laboratory for Thin Film and Micro fabrication of Ministry of Education, and Collaborative Innovation Center of IFSA, Shanghai Jiao Tong University, Shanghai, China)
,
Chen Xiang
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano-electronics, Key Laboratory for Thin Film and Micro fabrication of Ministry of Education, and Collaborative Innovation Center of IFSA, Shanghai Jiao Tong University, Shanghai, China)
,
Liu Jing-Quan
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano-electronics, Key Laboratory for Thin Film and Micro fabrication of Ministry of Education, and Collaborative Innovation Center of IFSA, Shanghai Jiao Tong University, Shanghai, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2018
号:
MEMS
ページ:
1249-1252
発行年:
2018年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)