文献
J-GLOBAL ID:201802279667485729
整理番号:18A1805806
相互相関とパワースペクトル密度法に基づくパターン品質と欠陥評価【JST・京大機械翻訳】
Pattern quality and defect evaluation based on cross correlation and power spectral density methods
著者 (8件):
Zhang Libin
(Institute of Microelectronics of Chinese Academy of Sciences, Integrated Circuit Advanced Process Center, No. 3 Bei-Tu-Cheng West Road, Beijing 100029, China)
,
Ma Le
(Institute of Microelectronics of Chinese Academy of Sciences, Integrated Circuit Advanced Process Center, No. 3 Bei-Tu-Cheng West Road, Beijing 100029, China)
,
Chen Rui
(Institute of Microelectronics of Chinese Academy of Sciences, Integrated Circuit Advanced Process Center, No. 3 Bei-Tu-Cheng West Road, Beijing 100029, China)
,
He Jianfang
(Institute of Microelectronics of Chinese Academy of Sciences, Integrated Circuit Advanced Process Center, No. 3 Bei-Tu-Cheng West Road, Beijing 100029, China)
,
Su Xiaojing
(Institute of Microelectronics of Chinese Academy of Sciences, Integrated Circuit Advanced Process Center, No. 3 Bei-Tu-Cheng West Road, Beijing 100029, China)
,
Dong Lisong
(Institute of Microelectronics of Chinese Academy of Sciences, Integrated Circuit Advanced Process Center, No. 3 Bei-Tu-Cheng West Road, Beijing 100029, China)
,
Su Yajuan
(Institute of Microelectronics of Chinese Academy of Sciences, Integrated Circuit Advanced Process Center, No. 3 Bei-Tu-Cheng West Road, Beijing 100029, China)
,
Wei Yayi
(Institute of Microelectronics of Chinese Academy of Sciences, Integrated Circuit Advanced Process Center, No. 3 Bei-Tu-Cheng West Road, Beijing 100029, China)
資料名:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
(Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena)
巻:
36
号:
5
ページ:
052902-052902-6
発行年:
2018年
JST資料番号:
E0974A
ISSN:
2166-2746
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)