文献
J-GLOBAL ID:201802284869854316
整理番号:18A0481414
非晶質炭素被覆層のプラズマ増強化学蒸着におけるプロセスモニタリングツールとしての発光分光法-多変量統計モデル化【Powered by NICT】
Optical emission spectroscopy as a process-monitoring tool in plasma enhanced chemical vapor deposition of amorphous carbon coatings - multivariate statistical modelling
著者 (12件):
Anooshehpour Farid
(Laboratory for Biomaterials and Bioengineering, Canada Research Chair Tier I in Biomaterials and Bioengineering for the Innovation in Surgery, Department of Mining, Metallurgy and Materials Engineering, CHU de Quebec Research Center, Universite Laval, 1065 Medicine ...)
,
Anooshehpour Farid
(Laboratoire d’Ingenierie de Surface, Centre de Recherche sur les Materiaux Avances, Departement de genie des mines, de la metallurgie et des materiaux, Universite Laval, 1045 avenue de la Medecine, Quebec, G1V 0A6 Quebec, Canada)
,
Anooshehpour Farid
(Centre de recherche du CHU de Quebec, Hopital St-Francois d’Assise, 10 rue de l’Espinay, Quebec, G1L 3L5, Quebec, Canada.)
,
Turgeon Stephane
(Laboratory for Biomaterials and Bioengineering, Canada Research Chair Tier I in Biomaterials and Bioengineering for the Innovation in Surgery, Department of Mining, Metallurgy and Materials Engineering, CHU de Quebec Research Center, Universite Laval, 1065 Medicine ...)
,
Turgeon Stephane
(Laboratoire d’Ingenierie de Surface, Centre de Recherche sur les Materiaux Avances, Departement de genie des mines, de la metallurgie et des materiaux, Universite Laval, 1045 avenue de la Medecine, Quebec, G1V 0A6 Quebec, Canada)
,
Turgeon Stephane
(Centre de recherche du CHU de Quebec, Hopital St-Francois d’Assise, 10 rue de l’Espinay, Quebec, G1L 3L5, Quebec, Canada.)
,
Cloutier Maxime
(Laboratory for Biomaterials and Bioengineering, Canada Research Chair Tier I in Biomaterials and Bioengineering for the Innovation in Surgery, Department of Mining, Metallurgy and Materials Engineering, CHU de Quebec Research Center, Universite Laval, 1065 Medicine ...)
,
Cloutier Maxime
(Centre de recherche du CHU de Quebec, Hopital St-Francois d’Assise, 10 rue de l’Espinay, Quebec, G1L 3L5, Quebec, Canada.)
,
Mantovani Diego
(Laboratory for Biomaterials and Bioengineering, Canada Research Chair Tier I in Biomaterials and Bioengineering for the Innovation in Surgery, Department of Mining, Metallurgy and Materials Engineering, CHU de Quebec Research Center, Universite Laval, 1065 Medicine ...)
,
Mantovani Diego
(Centre de recherche du CHU de Quebec, Hopital St-Francois d’Assise, 10 rue de l’Espinay, Quebec, G1L 3L5, Quebec, Canada.)
,
Laroche Gaetan
(Laboratoire d’Ingenierie de Surface, Centre de Recherche sur les Materiaux Avances, Departement de genie des mines, de la metallurgie et des materiaux, Universite Laval, 1045 avenue de la Medecine, Quebec, G1V 0A6 Quebec, Canada)
,
Laroche Gaetan
(Centre de recherche du CHU de Quebec, Hopital St-Francois d’Assise, 10 rue de l’Espinay, Quebec, G1L 3L5, Quebec, Canada.)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
649
ページ:
106-114
発行年:
2018年
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)