文献
J-GLOBAL ID:201802285387375899
整理番号:18A1592984
低圧測定のためのRoodビームピエゾ抵抗圧力センサと組み合わせたannular溝付き膜の設計,製作および特性評価【JST・京大機械翻訳】
Design, fabrication and characterization of an annularly grooved membrane combined with rood beam piezoresistive pressure sensor for low pressure measurements
著者 (7件):
Li Chuang
(UPM Laser Centre, Universidad Politecnica de Madrid, C/ Alan Turing 1, 28031 Madrid, Spain)
,
Li Chuang
(Suzhou Changfeng Avionics Co., Ltd, Suzhou 215151, PR China)
,
Xie Jianbing
(Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, PR China)
,
Cordovilla Francisco
(UPM Laser Centre, Universidad Politecnica de Madrid, C/ Alan Turing 1, 28031 Madrid, Spain)
,
Zhou Jinqiu
(Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, PR China)
,
Jagdheesh R.
(UPM Laser Centre, Universidad Politecnica de Madrid, C/ Alan Turing 1, 28031 Madrid, Spain)
,
Ocana Jose L.
(UPM Laser Centre, Universidad Politecnica de Madrid, C/ Alan Turing 1, 28031 Madrid, Spain)
資料名:
Sensors and Actuators. A. Physical
(Sensors and Actuators. A. Physical)
巻:
279
ページ:
525-536
発行年:
2018年
JST資料番号:
B0345C
ISSN:
0924-4247
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)