文献
J-GLOBAL ID:201802286081803780
整理番号:18A0194490
大ストロークと非干渉化特性を有するナノ位置決めステージの開発と反復補償PID制御【Powered by NICT】
Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property
著者 (11件):
Tang Hui
(Key Laboratory of Precision Microelectronic Manufacturing Technology and Equipment of the Ministry of Education, Guangdong University of Technology, Guangzhou, China)
,
Gao Jian
(Key Laboratory of Precision Microelectronic Manufacturing Technology and Equipment of the Ministry of Education, Guangdong University of Technology, Guangzhou, China)
,
Chen Xin
(Key Laboratory of Precision Microelectronic Manufacturing Technology and Equipment of the Ministry of Education, Guangdong University of Technology, Guangzhou, China)
,
Yu Kai-Ming
(Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Hong Kong)
,
To Suet
(Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Hong Kong)
,
He Yunbo
(Key Laboratory of Precision Microelectronic Manufacturing Technology and Equipment of the Ministry of Education, Guangdong University of Technology, Guangzhou, China)
,
Chen Xun
(Key Laboratory of Precision Microelectronic Manufacturing Technology and Equipment of the Ministry of Education, Guangdong University of Technology, Guangzhou, China)
,
Zeng Zhaohe
(Key Laboratory of Precision Microelectronic Manufacturing Technology and Equipment of the Ministry of Education, Guangdong University of Technology, Guangzhou, China)
,
He Sifeng
(Key Laboratory of Precision Microelectronic Manufacturing Technology and Equipment of the Ministry of Education, Guangdong University of Technology, Guangzhou, China)
,
Chen Chuangbin
(Key Laboratory of Precision Microelectronic Manufacturing Technology and Equipment of the Ministry of Education, Guangdong University of Technology, Guangzhou, China)
,
Li Yangmin
(Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Hong Kong)
資料名:
IEEE Transactions on Industrial Electronics
(IEEE Transactions on Industrial Electronics)
巻:
65
号:
5
ページ:
3995-4005
発行年:
2018年
JST資料番号:
C0234A
ISSN:
0278-0046
CODEN:
ITIED6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)