文献
J-GLOBAL ID:201802286530547608
整理番号:18A1621740
走査電子顕微鏡内の自動化ナノマニピュレーションに向けたシステム較正【JST・京大機械翻訳】
System Calibration Towards Automated Nanomanipulation Inside Scanning Electron Microscope
著者 (6件):
Wang Mingyu
(Jiangsu Provincial Key Labratory of Advanced Robotics & Collaborative ¥Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China)
,
Wang Yaqiong
(Jiangsu Provincial Key Labratory of Advanced Robotics & Collaborative ¥Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China)
,
Yang Zhan
(Jiangsu Provincial Key Labratory of Advanced Robotics & Collaborative ¥Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China)
,
Chen Tao
(Jiangsu Provincial Key Labratory of Advanced Robotics & Collaborative ¥Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China)
,
Sun Lining
(Jiangsu Provincial Key Labratory of Advanced Robotics & Collaborative ¥Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215123, China)
,
Fukuda Toshio
(Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya, 464-8603, Japan)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
CYBER
ページ:
1135-1140
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)