文献
J-GLOBAL ID:201802291227988763
整理番号:18A1212603
SiCl4-BCl3-NH3-H2-Ar環境におけるSiBN堆積速度に及ぼすSiCl4流速の影響【JST・京大機械翻訳】
Effect of the SiCl4 Flow Rate on SiBN Deposition Kinetics in SiCl4-BCl3-NH3-H2-Ar Environment
著者 (7件):
Li Jianping
(Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an 710072, Shaanxi, China)
,
Qin Hailong
(Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an 710072, Shaanxi, China)
,
Liu Yongsheng
(Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an 710072, Shaanxi, China)
,
Ye Fang
(Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an 710072, Shaanxi, China)
,
Li Zan
(Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an 710072, Shaanxi, China)
,
Cheng Laifei
(Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an 710072, Shaanxi, China)
,
Zhang Litong
(Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an 710072, Shaanxi, China)
資料名:
Materials (Web)
(Materials (Web))
巻:
10
号:
6
ページ:
627
発行年:
2017年
JST資料番号:
U7237A
ISSN:
1996-1944
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
スイス (CHE)
言語:
英語 (EN)