文献
J-GLOBAL ID:201902230977528716
整理番号:19A0900725
EUVのためのロバストなPSCARプロセスの構築【JST・京大機械翻訳】
Constructing a robust PSCAR process for EUV
著者 (29件):
Carcasi Michael
(Tokyo Electron America, Inc. (United States))
,
Nagahara Seiji
(Tokyo Electron Ltd. (Japan))
,
Shiraishi Gosuke
(Tokyo Electron Kyushu Ltd. (Japan))
,
Minekawa Yukie
(Tokyo Electron Kyushu Ltd. (Japan))
,
Ide Hiroyuki
(Tokyo Electron Kyushu Ltd. (Japan))
,
Kondo Yoshihiro
(Tokyo Electron Kyushu Ltd. (Japan))
,
Yoshihara Kosuke
(Tokyo Electron Kyushu Ltd. (Japan))
,
Tomono Masaru
(Tokyo Electron Kyushu Ltd. (Japan))
,
Shimada Ryo
(Tokyo Electron Kyushu Ltd. (Japan))
,
Takeshita Kazuhiro
(Tokyo Electron Kyushu Ltd. (Japan))
,
Moriya Teruhiko
(Tokyo Electron Kyushu Ltd. (Japan))
,
Kamei Yuya
(Tokyo Electron Kyushu Ltd. (Belgium))
,
Nafus Kathleen
(Tokyo Electron America, Inc. (Belgium))
,
Biesemans Serge
(Tokyo Electron Europe Ltd. (Belgium))
,
Nakashima Hideo
(Tokyo Electron Ltd. (Japan))
,
Hori Masafumi
(JSR Corp. (Japan))
,
Maruyama Ken
(JSR Corp. (Japan))
,
Nakagawa Hisashi
(JSR Corp. (Japan))
,
Nagai Tomoki
(JSR Corp. (Japan))
,
Dei Satoshi
(JSR Micro N.V. (Belgium))
,
Miyake Masayuki
(JSR Micro N.V. (Belgium))
,
Naruoka Takehiko
(JSR Micro N.V. (Belgium))
,
Shima Motoyuki
(JSR Corp. (Japan))
,
Vandenberghe Geert
(IMEC (Belgium))
,
De Simone Danilo
(IMEC (Belgium))
,
Foubert Philippe
(IMEC (Belgium))
,
Petersen John S.
(IMEC (Belgium))
,
Oshima Akihiro
(Osaka Univ. (Japan))
,
Tagawa Seiichi
(Osaka Univ. (Japan))
資料名:
Proceedings of SPIE
(Proceedings of SPIE)
巻:
10583
ページ:
105831M-14
発行年:
2018年
JST資料番号:
D0943A
ISSN:
0277-786X
CODEN:
PSISDG
資料種別:
会議録 (C)
記事区分:
短報
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)