文献
J-GLOBAL ID:201902240509953167
整理番号:19A1414805
低熱収支での応力誘起結晶化によるTiN/Hf_0.5Zr_0.5O_2/TiNキャパシタの大きな強誘電分極【JST・京大機械翻訳】
Large ferroelectric polarization of TiN/Hf0.5Zr0.5O2/TiN capacitors due to stress-induced crystallization at low thermal budget
著者 (14件):
Kim Si Joon
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Narayan Dushyant
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Lee Jae-Gil
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Mohan Jaidah
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Lee Joy S.
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Lee Jaebeom
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Kim Harrison S.
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Byun Young-Chul
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Lucero Antonio T.
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Young Chadwin D.
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
,
Summerfelt Scott R.
(Texas Instruments, 13121 TI Blvd, Dallas, Texas 75243, USA)
,
San Tamer
(Texas Instruments, 13121 TI Blvd, Dallas, Texas 75243, USA)
,
Colombo Luigi
(Texas Instruments, 13121 TI Blvd, Dallas, Texas 75243, USA)
,
Kim Jiyoung
(Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, USA)
資料名:
Applied Physics Letters
(Applied Physics Letters)
巻:
111
号:
24
ページ:
242901-242901-5
発行年:
2017年
JST資料番号:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)