文献
J-GLOBAL ID:201902260364637119
整理番号:19A0624638
トレンチ側壁上に堆積した水素化非晶質炭素膜の構造と機械的性質に及ぼす前駆体ガスの影響【JST・京大機械翻訳】
Effect of precursor gas on the structure and mechanical properties of hydrogenated amorphous carbon films deposited on a trench sidewall
著者 (4件):
Hirata Yuki
(Department of Mechanical Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo, Japan)
,
Kitamura Kanju
(Department of Mechanical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan)
,
Ishikawa Takumi
(Department of Mechanical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan)
,
Choi Junho
(Department of Mechanical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan)
資料名:
Journal of Applied Physics
(Journal of Applied Physics)
巻:
125
号:
6
ページ:
065306-065306-10
発行年:
2019年
JST資料番号:
C0266A
ISSN:
0021-8979
CODEN:
JAPIAU
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)