文献
J-GLOBAL ID:201902264654541204
整理番号:19A0995396
フッ素ドープ酸化スズ膜のフェムト秒パルスレーザエッチングにおけるパラメータ最適化【JST・京大機械翻訳】
Parameter optimization in femtosecond pulsed laser etching of fluorine-doped tin oxide films
著者 (14件):
Wang Yi-lun
(School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, PR China)
,
Wang Yi-lun
(Jiangsu Provincial Key Laboratory of Center for Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, PR China)
,
Li Bao-jia
(School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, PR China)
,
Li Bao-jia
(Jiangsu Provincial Key Laboratory of Center for Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, PR China)
,
Li Shuang-shuang
(School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, PR China)
,
Li Shuang-shuang
(Jiangsu Provincial Key Laboratory of Center for Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, PR China)
,
Li Shuang-shuang
(School of Electromechanical and Automobile Engineering, Changzhou Vocational Institute of Engineering, Changzhou 213164, PR China)
,
Li Huang
(School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, PR China)
,
Li Huang
(Jiangsu Provincial Key Laboratory of Center for Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, PR China)
,
Huang Li-jing
(School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, PR China)
,
Huang Li-jing
(Institute of Micro-nano Optoelectronic and Terahertz Technology, Jiangsu University, Zhenjiang 212013, PR China)
,
Huang Li-jing
(Jiangsu Provincial Key Laboratory of Center for Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, PR China)
,
Ren Nai-fei
(School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, PR China)
,
Ren Nai-fei
(Jiangsu Provincial Key Laboratory of Center for Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, PR China)
資料名:
Optics & Laser Technology
(Optics & Laser Technology)
巻:
116
ページ:
162-170
発行年:
2019年
JST資料番号:
D0245B
ISSN:
0030-3992
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)