文献
J-GLOBAL ID:201902269239837702
整理番号:19A0902125
横せん断干渉法の測定精度を改善する方法【JST・京大機械翻訳】
A method for improving the measurement accuracy of lateral shearing interferometry
著者 (10件):
Li Jie
(China Academy of Engineering Physics (China))
,
Tang Feng
(Shanghai Institute of Optics and Fine Mechanics (China))
,
Wang Xiangzhao
(Shanghai Institute of Optics and Fine Mechanics (China))
,
Ba Rongsheng
(China Academy of Engineering Physics (China))
,
Zhou Xinda
(China Academy of Engineering Physics (China))
,
Zheng Yinbo
(China Academy of Engineering Physics (China))
,
Ding Lei
(China Academy of Engineering Physics (China))
,
Chen Bo
(China Academy of Engineering Physics (China))
,
Yang Xiaoyu
(China Academy of Engineering Physics (China))
,
Yuan Jing
(China Academy of Engineering Physics (China))
資料名:
Proceedings of SPIE
(Proceedings of SPIE)
巻:
10618
ページ:
106180P-8
発行年:
2018年
JST資料番号:
D0943A
ISSN:
0277-786X
CODEN:
PSISDG
資料種別:
会議録 (C)
記事区分:
短報
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)