文献
J-GLOBAL ID:201902276428780540
整理番号:19A1052548
ZrN,WN及びZrWN膜の構造及び特性に及ぼす堆積パラメータの影響【JST・京大機械翻訳】
Effects of deposition parameters on the structure and properties of ZrN, WN and ZrWN films
著者 (6件):
Wu C Y
(Marine College, Beibu Gulf University, Qinzhou, People’s Republic of China)
,
Chen J H
(Department of Industrial Education, National Taiwan Normal University, Taipei, Taiwan)
,
Kuo C G
(Department of Industrial Education, National Taiwan Normal University, Taipei, Taiwan)
,
Twu M J
(Department of Mechatronic Engineering, National Taiwan Normal University, Taipei, Taiwan)
,
Peng S W
(Department of Mechatronic Engineering, National Taiwan Normal University, Taipei, Taiwan)
,
Hsu C Y
(Department of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan, Taiwan)
資料名:
Bulletin of Materials Science
(Bulletin of Materials Science)
巻:
42
号:
1
ページ:
1-11
発行年:
2019年
JST資料番号:
T0142A
ISSN:
0250-4707
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
ドイツ (DEU)
言語:
英語 (EN)