文献
J-GLOBAL ID:201902282926619579
整理番号:19A0135164
応力分離層を有する共振圧力マイクロセンサ【JST・京大機械翻訳】
A Resonant Pressure Micro Sensor with a Stress Isolation Layer
著者 (9件):
Lu Yulan
(Chinese Academy of Sciences, State Key Laboratory of Transducer Technology Institute of Electronics, Beijing, 100190, China)
,
Xie Bo
(Chinese Academy of Sciences, State Key Laboratory of Transducer Technology Institute of Electronics, Beijing, 100190, China)
,
Wei Qiuxu
(Chinese Academy of Sciences, State Key Laboratory of Transducer Technology Institute of Electronics, Beijing, 100190, China)
,
Li Yadong
(Chinese Academy of Sciences, State Key Laboratory of Transducer Technology Institute of Electronics, Beijing, 100190, China)
,
Shi Xiaoqing
(Chinese Academy of Sciences, State Key Laboratory of Transducer Technology Institute of Electronics, Beijing, 100190, China)
,
Xiang Chao
(Chinese Academy of Sciences, State Key Laboratory of Transducer Technology Institute of Electronics, Beijing, 100190, China)
,
Chen Deyong
(Chinese Academy of Sciences, State Key Laboratory of Transducer Technology Institute of Electronics, Beijing, 100190, China)
,
Wang Junbo
(Chinese Academy of Sciences, State Key Laboratory of Transducer Technology Institute of Electronics, Beijing, 100190, China)
,
Chen Jian
(Chinese Academy of Sciences, State Key Laboratory of Transducer Technology Institute of Electronics, Beijing, 100190, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2018
号:
SENSORS
ページ:
1-4
発行年:
2018年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)