文献
J-GLOBAL ID:201902291437990459
整理番号:19A1455052
室温での表面活性化結合により作製したGaAs/Si界面の結晶度に及ぼすAr原子照射の影響【JST・京大機械翻訳】
Impact of Ar atom irradiation on the crystallinity of GaAs/Si interfaces fabricated by surface activated bonding at room temperature
著者 (6件):
Ohno Yutaka
(Institute for Materials Research (IMR), Tohoku University, Sendai, 980-8577, Japan)
,
Miyagawa Reina
(Department of Physical Science and Engineering, Nagoya Institute of Technology, Gokiso-cho, Nagoya, 466-8555, Japan)
,
Yoshida Hideto
(The Institute of Scientific and Industrial Research (ISIR), Osaka University, Osaka, 567-0047, Japan)
,
Takeda Seiji
(The Institute of Scientific and Industrial Research (ISIR), Osaka University, Osaka, 567-0047, Japan)
,
Liang Jianbo
(Graduate School of Engineering, Osaka City University, Osaka, 558-8585, Japan)
,
Shigekawa Naoteru
(Graduate School of Engineering, Osaka City University, Osaka, 558-8585, Japan)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2019
号:
LTB-3D
ページ:
2
発行年:
2019年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)