文献
J-GLOBAL ID:201902292160666494
整理番号:19A1112041
残留金属膜による超伝導共振器の品質因子の劣化とカルデラ平坦化を用いた改良製造プロセス【JST・京大機械翻訳】
Degradation of Quality Factor of Superconducting Resonators by Remaining Metallic Film and Improved Fabrication Process Using Caldera Planarization
著者 (12件):
Irimatsugawa Tomoya
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Yamamori Hirotake
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Hirayama Fuminori
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Nagasawa Shuichi
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Fujii Go
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Kohjiro Satoshi
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Sato Akira
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Fukuda Daiji
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Hidaka Mutsuo
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Sato Yasushi
(National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan)
,
Ohno Masashi
(Graduate School of Engineering, The University of Tokyo, Tokyo, Japan)
,
Takahashi Hiroyuki
(Graduate School of Engineering, The University of Tokyo, Tokyo, Japan)
資料名:
IEEE Transactions on Applied Superconductivity
(IEEE Transactions on Applied Superconductivity)
巻:
29
号:
5
ページ:
ROMBUNNO.1102406.1-6
発行年:
2019年
JST資料番号:
W0177A
ISSN:
1051-8223
CODEN:
ITASE9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)