文献
J-GLOBAL ID:202002212432161856
整理番号:20A0634441
反復可能,複製可能,再現可能な測定のための生からリポジトリへの特性化データ変換【JST・京大機械翻訳】
Raw-to-repository characterization data conversion for repeatable, replicable, and reproducible measurements
著者 (9件):
Suzuki Mineharu
(Materials Data Platform Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan)
,
Nagao Hiroko
(Materials Data Platform Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan)
,
Harada Yoshitomo
(Materials Data Platform Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan)
,
Shinotsuka Hiroshi
(Materials Data Platform Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan)
,
Watanabe Katsumi
(ULVAC-PHI Incorporated, 2500 Hagisono, Chigasaki, Kanagawa 253-8522, Japan)
,
Sasaki Akito
(Rigaku Corporation, 3-9-12 Matsubara-cho, Akishima, Tokyo 196-8666, Japan)
,
Matsuda Asahiko
(Materials Data Platform Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan)
,
Kimoto Koji
(Research Center for Advanced Measurement and Characterization, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan)
,
Yoshikawa Hideki
(Materials Data Platform Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan)
資料名:
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films
(Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films)
巻:
38
号:
2
ページ:
023204-023204-15
発行年:
2020年
JST資料番号:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)