文献
J-GLOBAL ID:202002221793290239
整理番号:20A1920984
銅配線のCMP後洗浄におけるBTA除去に及ぼす複合剤の相乗効果【JST・京大機械翻訳】
Synergistic effect of composite complex agent on BTA removal in post CMP cleaning of copper interconnection
著者 (17件):
Yin Da
(School of Electronics and Information Engineering, Hebei University of Technology, Tianjin, 300130, People’s Republic of China)
,
Yin Da
(Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin, 300130, People’s Republic of China)
,
Yang Liu
(School of Electronics and Information Engineering, Hebei University of Technology, Tianjin, 300130, People’s Republic of China)
,
Yang Liu
(Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin, 300130, People’s Republic of China)
,
Yang Liu
(School of Electronic and Control Engineering, North China Institute of Aerospace Engineering, Langfang, 065000, People’s Republic of China)
,
Ma Tengda
(School of Electronics and Information Engineering, Hebei University of Technology, Tianjin, 300130, People’s Republic of China)
,
Ma Tengda
(Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin, 300130, People’s Republic of China)
,
Xu Yi
(School of Electronics and Information Engineering, Hebei University of Technology, Tianjin, 300130, People’s Republic of China)
,
Xu Yi
(Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin, 300130, People’s Republic of China)
,
Tan Baimei
(School of Electronics and Information Engineering, Hebei University of Technology, Tianjin, 300130, People’s Republic of China)
,
Tan Baimei
(Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin, 300130, People’s Republic of China)
,
Yang Fan
(School of Electronics and Information Engineering, Hebei University of Technology, Tianjin, 300130, People’s Republic of China)
,
Yang Fan
(Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin, 300130, People’s Republic of China)
,
Sun Xiaoqin
(School of Electronics and Information Engineering, Hebei University of Technology, Tianjin, 300130, People’s Republic of China)
,
Sun Xiaoqin
(Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin, 300130, People’s Republic of China)
,
Liu Mengrui
(School of Electronics and Information Engineering, Hebei University of Technology, Tianjin, 300130, People’s Republic of China)
,
Liu Mengrui
(Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin, 300130, People’s Republic of China)
資料名:
Materials Chemistry and Physics
(Materials Chemistry and Physics)
巻:
252
ページ:
Null
発行年:
2020年
JST資料番号:
E0934A
ISSN:
0254-0584
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)