文献
J-GLOBAL ID:202002223312712298
整理番号:20A0007748
表面格子化Siベース多層構造の光学特性【JST・京大機械翻訳】
Optical properties of surface grated Si-based multilayer structure
著者 (10件):
Bayramov Ayaz
(Institute of Physics, Azerbaijan National Academy of Sciences. H. Javid 131, Az 1143 Baku, Azerbaijan)
,
Alizade Elvin
(Institute of Physics, Azerbaijan National Academy of Sciences. H. Javid 131, Az 1143 Baku, Azerbaijan)
,
Mammadov Samir
(InstitutfuerPhysik, TU Chemnitz, Reichenhainer Str. 70, 09126 Chemnitz, Germany)
,
Tavkhelidze Avtandil
(Ilia State University, Cholokashviliave. 3-5, 0162 Tbilisi, Georgia)
,
Mamedov Nazim
(Institute of Physics, Azerbaijan National Academy of Sciences. H. Javid 131, Az 1143 Baku, Azerbaijan)
,
Aliyeva Yegana
(Institute of Physics, Azerbaijan National Academy of Sciences. H. Javid 131, Az 1143 Baku, Azerbaijan)
,
Ahmedova Khuraman
(Institute of Physics, Azerbaijan National Academy of Sciences. H. Javid 131, Az 1143 Baku, Azerbaijan)
,
Asadullayeva Saida
(Institute of Physics, Azerbaijan National Academy of Sciences. H. Javid 131, Az 1143 Baku, Azerbaijan)
,
Jangidze Larissa
(Institute of Micro and Nanoelectronics, Chavchavadze Ave. 13, 0162 Tbilisi, Georgia)
,
Skhiladze Givi
(Institute of Micro and Nanoelectronics, Chavchavadze Ave. 13, 0162 Tbilisi, Georgia)
資料名:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
(Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena)
巻:
37
号:
6
ページ:
061807-061807-4
発行年:
2019年
JST資料番号:
E0974A
ISSN:
2166-2746
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)