文献
J-GLOBAL ID:202002224650786837
整理番号:20A1938715
DCマグネトロンスパッタNi-Zr合金薄膜の構造と特性に及ぼす基板バイアス電圧の影響【JST・京大機械翻訳】
Influence of substrate bias voltage on structure and properties of DC magnetron sputtered Ni-Zr alloy thin films
著者 (3件):
Sahu Bibhu Prasad
(Department of Metallurgical and Materials Engineering, Indian Institute of Technology Kharagpur, Kharagpur, West Bengal, India)
,
Dutta Amlan
(Department of Metallurgical and Materials Engineering, Indian Institute of Technology Kharagpur, Kharagpur, West Bengal, India)
,
Mitra Rahul
(Department of Metallurgical and Materials Engineering, Indian Institute of Technology Kharagpur, Kharagpur, West Bengal, India)
資料名:
Journal of Materials Research
(Journal of Materials Research)
巻:
35
号:
12
ページ:
1543-1555
発行年:
2020年
JST資料番号:
D0987B
ISSN:
0884-2914
CODEN:
JMREEE
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)