文献
J-GLOBAL ID:202002225950126516
整理番号:20A0007752
アクティブ片持梁を用いたチップベース電子ビーム誘起蒸着【JST・京大機械翻訳】
Tip-based electron beam induced deposition using active cantilevers
著者 (8件):
Holz Mathias
(nano analytik GmbH, 98693 Ilmenau, Germany)
,
Allen Frances I.
(Department of Materials Science and Engineering, University of California, Berkeley, California 94720)
,
Reuter Christoph
(nano analytik GmbH, 98693 Ilmenau, Germany)
,
Ahmad Ahmad
(nano analytik GmbH, 98693 Ilmenau, Germany)
,
Hofmann Martin
(Department of Micro- and Nanoelectronic Systems, Technische Universitaet Ilmenau, 98693 Ilmenau, Germany)
,
Reum Alexander
(nano analytik GmbH, 98693 Ilmenau, Germany)
,
Ivanov Tzvetan
(Department of Micro- and Nanoelectronic Systems, Technische Universitaet Ilmenau, 98693 Ilmenau, Germany)
,
Rangelow Ivo W.
(nano analytik GmbH, 98693 Ilmenau, Germany)
資料名:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
(Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena)
巻:
37
号:
6
ページ:
061812-061812-4
発行年:
2019年
JST資料番号:
E0974A
ISSN:
2166-2746
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)