文献
J-GLOBAL ID:202002226855299680
整理番号:20A1566140
差動AMRプローブを用いたサブミリメートル分解能を有する裏面スリットの評価【JST・京大機械翻訳】
Evaluation of Back-Side Slits with Sub-millimeter Resolution Using a Differential AMR Probe
著者 (6件):
Zaini M. A. H. P.
(Faculty of Electrical & Electronics Engineering, Universiti Malaysia Pahang, Pekan, Pahang, Malaysia)
,
Saari M. M.
(Faculty of Electrical & Electronics Engineering, Universiti Malaysia Pahang, Pekan, Pahang, Malaysia)
,
Nadzri N. A.
(Faculty of Electrical & Electronics Engineering, Universiti Malaysia Pahang, Pekan, Pahang, Malaysia)
,
Halil A. M.
(Faculty of Mechanical & Manufacturing Engineering, University Malaysia Pahang, Pekan, Pahang, Malaysia)
,
Hanifah A. J. S.
(Faculty of Mechanical & Manufacturing Engineering, University Malaysia Pahang, Pekan, Pahang, Malaysia)
,
Tsukada K.
(Graduate School of Interdisciplinary Science and Engineering in Health Systems, Okayama University, Okayama, Japan)
資料名:
Lecture Notes in Electrical Engineering
(Lecture Notes in Electrical Engineering)
巻:
666
ページ:
319-328
発行年:
2020年
JST資料番号:
W5070A
ISSN:
1876-1100
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
ドイツ (DEU)
言語:
英語 (EN)