文献
J-GLOBAL ID:202002235007394886
整理番号:20A1414937
トポタクチック酸化を用いたAlドープZnOシード層を有するマグネトロンスパッタVO_2薄膜の集合組織と相制御【JST・京大機械翻訳】
Texture and phase control of magnetron-sputtered VO2 thin films with an Al-doped ZnO seed layer using topotactic oxidization
著者 (4件):
Nomoto Junichi
(Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan)
,
Yamaguchi Iwao
(Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan)
,
Nakajima Tomohiko
(Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan)
,
Tsuchiya Tetsuo
(Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan)
資料名:
Surface & Coatings Technology
(Surface & Coatings Technology)
巻:
394
ページ:
Null
発行年:
2020年
JST資料番号:
D0205C
ISSN:
0257-8972
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)