文献
J-GLOBAL ID:202002241028390011
整理番号:20A0916383
周波数トリミングのためのマイクロ蒸発器と統合したマイクロオーブン制御MEMS発振器【JST・京大機械翻訳】
Micro-Oven-Controlled MEMS Oscillator Integrated with Micro-Evaporator for Frequency Trimming
著者 (7件):
Pei Binbin
(University of Chinese Academy of Sciences,Beijing,CHINA,100049)
,
Sun Ke
(State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Shanghai,CHINA,200050)
,
Zhong Peng
(University of Chinese Academy of Sciences,Beijing,CHINA,100049)
,
Yu Tingting
(University of Chinese Academy of Sciences,Beijing,CHINA,100049)
,
Ye Chaozhan
(University of Chinese Academy of Sciences,Beijing,CHINA,100049)
,
Yang Heng
(State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Shanghai,CHINA,200050)
,
Li Xinxin
(State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Shanghai,CHINA,200050)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2020
号:
MEMS
ページ:
1199-1202
発行年:
2020年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)