文献
J-GLOBAL ID:202002252686071056
整理番号:20A1011676
緩衝ふっ化水素酸に曝露した構造タンタル膜の圧縮と減圧【JST・京大機械翻訳】
Compression and decompression of structural tantalum films exposed to buffered hydrofluoric acid
著者 (5件):
Ni Longchang
( Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, United States of America)
,
Karagoz Burcu
( Department of Chemical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, United States of America)
,
Gellman Andrew J
( Department of Chemical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, United States of America)
,
Gellman Andrew J
( Wilton E. Scott Institute for Energy Innovation, Carnegie Mellon University, Pittsburgh, PA 15213, United States of America)
,
De Boer Maarten P
( Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, United States of America)
資料名:
Journal of Micromechanics and Microengineering
(Journal of Micromechanics and Microengineering)
巻:
30
号:
5
ページ:
055011 (9pp)
発行年:
2020年
JST資料番号:
W1424A
ISSN:
0960-1317
CODEN:
JMMIEZ
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)