文献
J-GLOBAL ID:202002254833623428
整理番号:20A0783783
ALD蒸着DBRによるエッチミラーUV-Cレーザダイオードのウエハ上作製【JST・京大機械翻訳】
On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR
著者 (8件):
Sakai Tadayoshi
(Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8603, Japan)
,
Kushimoto Maki
(Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8603, Japan)
,
Zhang Ziyi
(Innovative Devices R&D Center, Corporate Research & Development, Asahi Kasei Corporation, Fuji, Shizuoka 416-8501, Japan)
,
Sugiyama Naoharu
(Center for Integrated Research of Future Electronics, Institute of Materials Research and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8601, Japan)
,
Schowalter Leo J.
(Center for Integrated Research of Future Electronics, Institute of Materials Research and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8601, Japan)
,
Honda Yoshio
(Center for Integrated Research of Future Electronics, Institute of Materials Research and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8601, Japan)
,
Sasaoka Chiaki
(Center for Integrated Research of Future Electronics, Institute of Materials Research and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8601, Japan)
,
Amano Hiroshi
(Center for Integrated Research of Future Electronics, Institute of Materials Research and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8601, Japan)
資料名:
Applied Physics Letters
(Applied Physics Letters)
巻:
116
号:
12
ページ:
122101-122101-4
発行年:
2020年
JST資料番号:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)